Application of SSRM

SSRM image of a p-type Si sample with staircase carrier profile. Seven stairs with carrier levels from 10¹⁶ to 10²⁰ atoms/cm³ are all observed with low noise, illustrating the large dynamic range and good conductivity. SSRM on Si requires high forces in order to penetrate through the native oxide and create a stable electrical contact. Adama diamond probes can withstand these high loads. Data acquired using a Bruker Dimension Icon AFM in SSRM using an AD-40-AS Adama Innovations probe.