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Home Products Kims Reference 標準片(Reference Material) Thickness measurement Nano Thickness Calibrator KRC-NTC-HfO2

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Nano Thickness Calibrator KRC-NTC-HfO2

KRC-NTC-HfO2: Nominal thickness: 5 nm, 10 nm, 15 nm, 20 nm Substrate: SiO2(2 nm) / Si(100) wafer

: Film deposition: Atomic Layer Deposition Certification method: Mutual calibration with TEM and MEIS

: Traceability: Silicon lattice constant measured by TEM

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