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Kims Reference 標準片(Reference Material)
Characterization of instrument
AFM Tip Characterizer KRC-ATC-20
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CRM for the characterization of AFM tip KRC-ATC-200
KRC-ATC-200P [CC-X]
Trench width: 50 nm, 100 nm, 200 nm
Pattern width: 50 nm (not certified)
Trench Height: 100 nm (not certified)
Pattern length:4.0 mm (certified area: 3.0 mm from center)
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